Keysight 10735A Three Axis Interferometer

Category - Standard Optics and Assemblies

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Description

DescriptionThe Keysight 10735A Three Axis Interferometer is used in multiple axis applications where linear and angular control of the stage is required. It combines in a single package the functionality of an optical bench with multiple beam benders, beam splitters, and three interferometers. The interferometers split an incoming laser beam into three beams to measure linear distance, pitch and yaw, or linear distance, roll and yaw. Three linear measurements provide the basis for calculating two angular measurements. The inherent beam parallelism ensures that there is essentially no cosine error between the three measurements and also ensures angle accuracy for pitch and yaw measurements. Other characteristics include:

High performance package saves setup time and improves system performance
Simple multi-axis installation
High angular resolution for better control
Wide angle range
Monolithic optics for maximized mechanical stability
Pre-aligned fiber optic remote receiver mounting
Referenced optics

The 10735A includes two shear plates to create 3 parallel beam paths, three cube corners, one reference mirror and two quarter wave plates.The 10735A and 10736A are identical except for the measurement beam patterns.

Application: 3 linear plane mirror measurements (displacement on X-axis, yaw on Z-axis and pitch on Y-axis)
Distinguishing Feature: 1 linear and 2 angular plane mirror measurements
# of Axis: 3
Maximum Beam Size: 9 mm
Beam Separation: see specs
Weight: 5.5 kg (12 lb 2.4 oz)
Fundamental Optical Resolution: &lambda,/4 (158.2 nm, 6.2 µ,in)
System Resolution: displacement &lambda,/128 (5 nm, 0.2 µ,in), yaw 0.039 arcsec (0.19 µ,rad), pitch 0.049 arcsec (0.24 µ,rad) based on using 32x electronic resolution extension
System Resolution: displacement &lambda,/1024 (0.62 nm, 0.024 µ,in), yaw 0.0049 arcsec (0.024 µ,rad), pitch 0.0061 arcsec (0.029 µ,rad) based on using 256x electronic resolution extension
System Resolution: displacement &lambda,/4096 (0.15 nm, 0.006 µ,in), yaw 0.0012 arcsec (0.006 µ,rad), pitch 0.0015 arcsec (0.007 µ,rad) based on using 1024x electronic resolution extension
Reflector: 10728A
Mount Used: custom
Referenced: Yes
Turned Configuration: n/a (turn only)

Learn more about Laser Interferometer Position Measurement Systems''